Q-MACS Process MC
The Q-MACS Process MC is a portable monitoring system for the in situ online measurement of industrial processes such as etching, deposition and nitriding plasma processes. It is based on the proven Q-MACS Basic technology. This in situ measurement system uses infrared absorption spectroscopy to measure absolute molecular concentrations inside the process chamber. The optical connection to the process reactor is provided via standard vacuum flanges.

• System with closed optical path
• Equipped with 1 to 4 lasers
• Sensitivity down to ppb range
• Time resolution down to milliseconds

The Q-MACS Process MC includes all the equipment and software needed to operate the system.

Q-MACS Process DC
The Q-MACS Process DC is an advanced measurement and monitoring system for online diagnostics of industrial processes, such as sintering, furnace and combustion processes. This open-path system uses infrared absorption spectroscopy to determine absolute molecular concentrations in difficult-to-access process rooms. The coupling is designed completely without mechanical connections to the process chamber under investigation. By the integration of a second exclusively internal detection path for background and reference measurements, the signal-to-noise ratio is significantly improved and an outstanding long-term stability is achieved.

• Open-path system
• Equipped with 1 to 2 lasers
• Reference and normalization channel
• Sensitivity % - ppb
• Time resolution down to sub-millisecond range

The Q-MACS Process DC includes all the equipment and software needed to operate the system.

Q-MACS Process fibre
The Q-MACS Process fibre is a mobile measurement and monitoring system for online diagnostics of industrial processes. The system uses infrared absorption spectroscopy to determine absolute molecular concentrations. A very good long-term stability is achieved by a two-channel design. The system is directly connected to the process to be analyzed by means of an infrared fiber, providing high flexibility of setup and low susceptibility to interference.

• System with closed optical path
• Equipped with 1 laser
• Reference- and normalization channel
• Sensitivity % - ppb
• Time resolution down to sub-millisecond range

The Q-MACS Process fibre is supplied with all the equipment and software required for operation.